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High-power 225 kV micro-focus tube and 190 kV nano-focus transmission tube - the perfect combination
The Comet Yxlon FF35 CT, FF35 CT Metrology, and FF35 CT SEMI cover an extraordinary range of applications. Capabilities include improved material testing in the R&D department, optimization of process control and small series inspection as well as various scientific applications. The dual X-ray tube set-up enables the high-resolution CT system to significantly expand quality assurance and research possibilities in the automotive, electronics, aviation, and material science industries.
With its high power of 320 W and water-cooled target, the 225 kV Comet Yxlon directional beam tube enables quick CT scans in less than a minute. In 2D operation, the tube reaches a spatial resolution of 4 μm. The possibility of switching between the micro-focus directional beam tube and the nano-focus transmission tube within a single inspection sequence substantially increases the application range.
CT scan of a battery
When it comes to part sizes of 10 mm and smaller, the 190 kV nano-focus transmission tube with its resolution in the submicron range is the right solution. It facilitates the high-resolution inspection of every kind of sample: While its water-cooled tube head allows for quick temperature balance and highest focal spot stability, four modes enable the optimal adjustment of the focal spot size in relation to power. Since both tubes have their own generator and HV cable, they can be switched without the need for reconfigurations.
Graphic symbols and a wide range of automated functions enable the intuitive user interface Geminy to provide easy operation – independent of the operator’s skill level. At the same time, it offers a great number of features for flexibility regarding part sizes and inspection tasks including CT trajectories such as HeliExtend (helical CT scan and reconstruction method), a horizontal field-of-view extension, a virtual rotation axis, and standard Quick/QualityScan.
The Comet Yxlon FF35 CT SEMI X-ray system is an innovative, versatile high-resolution CT system for use in research and development and quality assurance. It was developed specifically for inspections in semiconductor-related industries. The FF35 CT SEMI meets the high SEMI® standards, including the hazard and safety standards SEMI® S2-0818 & SEMI® S8-0218, and is certified accordingly.
The Comet Yxlon FF35 CT Metrology takes the accuracy of CT-based dimensional control, e.g., measurements of finest inner structures, to the next level . It captures nearly unlimited measuring points in one CT scan decoupled from the measurement evaluation. Seamless defect analysis and nominal-actual comparison save time and reduce correction loops and correction costs for product samplings. The FF35 CT Metrology meets the standards of VDI/ VDE 2630.